Nano-Fabrication of Integrated Solid State Devices

Course Type: 
EE
Code: 
6100
Level: 
Graduate
Credit Hours: 
3
Schedule Type: 
Lecture
Description: 

This course covers the history, design, and fabrication of CMOS and micro-electro-mechanical systems (MEMS). Typical fabrication methods cover CMOS, front-end-of-line (FEOL), back-end-of-line (BEOL), surface and bulk micromachining. Typical VLSI devices and selected RF MEMS are covered.

Restrictions: 
Must be enrolled in one of the following Levels: Graduate, Medical, Professional. Must be enrolled in one of the following Colleges: College of Egr & Computer Sci.