Nano-Fabrication of Integrated Solid State Devices

Course Type: 
EE
Code: 
4100
Level: 
Undergraduate
Credit Hours: 
3
Schedule Type: 
Lecture
Description: 

History, design, and fabrication of CMOS and micro-electro-mechanical systems (MEMS). CMOS front-end-of-line (FEOL), back-end-of-line (BEOL), surface micromachining and bulk micromachining. Typical VLSI devices and selected RF MEMS.

Prerequisites: 

Undergraduate level PHY 2410 Minimum Grade of D and Undergraduate level PHY 2410L Minimum Grade of D and ((Undergraduate level EE 3310 Minimum Grade of D and Undergraduate level EE 3310L Minimum Grade of D) or Undergraduate level PHY 2420 Minimum Grade of D)

Restrictions: 
Must be enrolled in one of the following Colleges: College of Egr & Computer Sci.